Plasma electronics : applications in microelectronic device fabrication /

More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technol...

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Bibliographic Details

Main Authors:	Makabe, T. (Toshiaki) (Author), Petrović, Z. (Author)
Corporate Author:	Taylor & Francis
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2026.
Edition:	Third edition.
Subjects:	Plasma engineering. Technique des plasmas. Plasma engineering Electronic books.
Online Access:	Connect to the full text of this electronic book