Micro-fluidic and micro-electromechanical system applications : subtractive processing of glass substrates /

The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and...

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Bibliographic Details

Corporate Author:	Taylor & Francis
Other Authors:	Toan, Nguyen Van (Editor), Singh, Tarlochan (Editor)
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2026.
Subjects:	Glass manufacture. Microelectromechanical systems > Industrial applications. Microelectromechanical systems > Design and construction. Microfluidic devices > Design and construction. Microfluidics > Industrial applications. Verre > Fabrication. Microsystèmes électromécaniques > Applications industrielles. Glass manufacture Microelectromechanical systems > Design and construction Microelectromechanical systems Microfluidic devices Microfluidics Electronic books.
Online Access:	Connect to the full text of this electronic book