Optical lithography for advanced semiconductor patterning /
Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of th...
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE Press,
[2025].
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| Series: | SPIE Press monograph ;
PM380. |
| Subjects: |
| Summary: | Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of the effects that impact the quality of the optical image inside the resist layer, a story that has become more complicated with every new lithography tool generation. This discussion builds gradually so that anyone with a graduate-type background in physics, chemistry or mathematics should be able to follow it from the start to the many subtleties of image formation in high-NA EUVL. It uses mathematics when useful and is accompanied by examples and case studies, many of which were created especially for this book. The book starts, however, with an extensive introduction to modern lithography, in which the interested reader can find a survey of all of the basic concepts, tailored to people who are new to lithography. The next three chapters discuss patterning techniques and logic and memory applications from the lithographer's viewpoint. The last three chapters discuss the role of the resist, stochastic effects and various types of computational lithography in use today. This book will be of value for people who are new to lithography as well as for the more experienced lithographer. |
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| Physical Description: | xxxiii, 1121 pages : color illustrations ; 27 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781510680333 1510680330 |