Optical lithography for advanced semiconductor patterning /

Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of th...

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Bibliographic Details

Main Author:	De Bisschop, Peter (Author)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE Press, [2025].
Series:	SPIE Press monograph ; PM380.
Subjects:	Semiconductors > Etching. Microlithography.