Ferroelectricity in doped hafnium oxide : materials, properties and devices /

Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices, Second Edition covers all aspects relating to the structural and electrical properties of HfO2 and its implementation into semiconductor devices. Fundamentals of ferroelectric and piezoelectric properties, HfO2 processes, an...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Schroeder, Uwe (Editor), Hwang, Cheol Seong (Editor), Funakubo, Hiroshi (Editor)
Format: eBook
Language:English
Published: Oxford : Woodhead Publishing, 2025.
Edition:Second edition.
Series:Woodhead Publishing series in electronic and optical materials
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Call Number: TK7871.99.M44
 
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