Comprehensive microsystems /

The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. Comprehensive Microsystems, Second Edition, Three Volume...

Full description

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Gianchandani, Yogesh B. (Editor)
Format:	eBook
Language:	English
Published:	[Place of publication not identified] : Elsevier, 2025.
Edition:	Second edition.
Subjects:	Microelectromechanical systems. Microsystèmes électromécaniques. Electronic books.
Online Access:	Connect to the full text of this electronic book