Nanolithography and surface microscopy with electron beams /
This volume, part of the Advances in Imaging and Electron Physics series, explores the development and applications of scanning electron microscopy (SEM) and electron beam technologies, as recounted by Lord Broers. The book provides insights into the early days of SEM development, detailing innovati...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
London, England :
Academic Press,
[2024]
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| Edition: | First edition. |
| Series: | Advances in imaging and electron physics ;
Volume 231. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This volume, part of the Advances in Imaging and Electron Physics series, explores the development and applications of scanning electron microscopy (SEM) and electron beam technologies, as recounted by Lord Broers. The book provides insights into the early days of SEM development, detailing innovations in electron optics, cathode technology, and lithography processes. It covers a range of topics including ion etching, cathode design, and the creation of nano-devices, with practical applications in semiconductor processing and biological specimen analysis. The text also reflects on the personal experiences and contributions of scientists in the field, offering a biographical perspective on scientific progress. Intended for researchers and professionals in electron microscopy and related fields, this work combines technical detail with historical context to highlight the evolution of electron physics. |
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| Physical Description: | 1 online resource (311 pages). |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780443314636 0443314632 9780443314629 0443314624 |