Nanolithography and surface microscopy with electron beams /

This volume, part of the Advances in Imaging and Electron Physics series, explores the development and applications of scanning electron microscopy (SEM) and electron beam technologies, as recounted by Lord Broers. The book provides insights into the early days of SEM development, detailing innovati...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Hÿtch, Martin (Editor), Hawkes, Peter W. (Editor)
Format:	eBook
Language:	English
Published:	London, England : Academic Press, [2024]
Edition:	First edition.
Series:	Advances in imaging and electron physics ; Volume 231.
Subjects:	Electron microscopy. Microscopie électronique. electron microscopy. Electronic books.
Online Access:	Connect to the full text of this electronic book