ScienceDirect (Online service), Hÿtch, M., & Hawkes, P. W. (2024). Nanolithography and surface microscopy with electron beams (First edition.). Academic Press.
Chicago Style (17th ed.) CitationScienceDirect (Online service), Martin Hÿtch, and Peter W. Hawkes. Nanolithography and Surface Microscopy with Electron Beams. First edition. London, England: Academic Press, 2024.
MLA (9th ed.) CitationScienceDirect (Online service), et al. Nanolithography and Surface Microscopy with Electron Beams. First edition. Academic Press, 2024.
Warning: These citations may not always be 100% accurate.