Coulomb interactions in particle beams /
This book delves into the theory of Coulomb interactions between charged particles, focusing on their effects in low-density particle beams used in electron and ion beam lithography and similar devices. It covers phenomena such as the Coulomb effect, trajectory displacement, space charge defocusing,...
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| Format: | eBook |
| Language: | English |
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London, England :
Academic Press,
[2024]
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| Edition: | First edition. |
| Series: | Advances in imaging and electron physics ;
Volume 230. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book delves into the theory of Coulomb interactions between charged particles, focusing on their effects in low-density particle beams used in electron and ion beam lithography and similar devices. It covers phenomena such as the Coulomb effect, trajectory displacement, space charge defocusing, and various statistical interactions. The book includes detailed discussions on particle optics, particle interactions, the Boersch effect, and Monte Carlo simulations. It is aimed at researchers and professionals in the field of imaging and electron physics, providing both theoretical models and practical insights into the dynamics of particle beams. |
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| Physical Description: | 1 online resource (721 pages). |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780443297854 0443297851 9780443297847 0443297843 |