Coulomb interactions in particle beams /

This book delves into the theory of Coulomb interactions between charged particles, focusing on their effects in low-density particle beams used in electron and ion beam lithography and similar devices. It covers phenomena such as the Coulomb effect, trajectory displacement, space charge defocusing,...

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Bibliographic Details

Main Author:	Jansen, Guus (Author)
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Hawkes, Peter W. (Editor), Hÿtch, Martin (Editor)
Format:	eBook
Language:	English
Published:	London, England : Academic Press, [2024]
Edition:	First edition.
Series:	Advances in imaging and electron physics ; Volume 230.
Subjects:	Coulomb excitation. Particle beams. Excitation coulombienne. Faisceaux de particules. Electronic books.
Online Access:	Connect to the full text of this electronic book