TSV 3D RF integration : high resistivity Si interposer technology /

TSV 3D RF Integration: High Resistivity Si Interposer Technology systematically introduces the design, process development and application verification of high-resistivity silicon interpose technology, addressing issues of high frequency loss and high integration level. The book includes a detailed...

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Bibliographic Details
Main Authors: Ma, Shenglin (Author), Jin, Yufeng (Author)
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Amsterdam, Netherlands : Elsevier, 2022.
Subjects:
Online Access:Connect to the full text of this electronic book

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