Laser annealing processes in semiconductor technology : theory, modeling and applications in nanoelectronics /

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Cristiano, Fuccio (Editor), La Magna, Antonino (Editor)
Format:	eBook
Language:	English
Published:	Oxford : Woodhead Publishing, 2021.
Series:	Woodhead Publishing series in electronic and optical materials.
Subjects:	Semiconductors. Semiconductors > Heat treatment. Lasers > Industrial applications. Semi-conducteurs. Semi-conducteurs > Traitement thermique. Lasers > Applications industrielles. semiconductor. Lasers > Industrial applications Semiconductors Semiconductors > Heat treatment Electronic books.
Online Access:	Connect to the full text of this electronic book