Handbook of silicon based mems materials and technologies /

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical,...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Tilli, Markku (Editor)
Format:	eBook
Language:	English
Published:	Amsterdam : Elsevier, 2020.
Edition:	Third edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Silicon. Micro-Electrical-Mechanical Systems Silicon Microsystèmes électromécaniques. Silicium. silicon. Microelectromechanical systems Electronic books.
Online Access:	Connect to the full text of this electronic book