Handbook of silicon based MEMS materials and technologies /

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Tilli, Markku (Editor)
Format:	eBook
Language:	English
Published:	London, UK : William Andrew is an imprint of Elsevier, 2015.
Edition:	Second edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Micro-Electrical-Mechanical Systems Microsystèmes électromécaniques. Microsystèmes électromécaniques > Matériaux. TECHNOLOGY & ENGINEERING > Mechanical. Microelectromechanical systems Microelectromechanical systems > Materials Silicon > Electric properties Electronic books.
Online Access:	Connect to the full text of this electronic book