Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, includin...

Full description

Bibliographic Details

Main Author:	Bhattacharyya, Bijoy (Author)
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Oxford, UK : William Andrew, an imprint of Elsevier, [2015]
Series:	Micro & nano technologies.
Subjects:	Micromachining. Nanotechnology. Microelectromechanical systems. Micro-Electrical-Mechanical Systems Nanotechnology Micro-usinage. Microsystèmes électromécaniques. Nanotechnologie. TECHNOLOGY & ENGINEERING > Engineering (General) TECHNOLOGY & ENGINEERING > Reference. Microelectromechanical systems Micromachining Electronic books.
Online Access:	Connect to the full text of this electronic book