Developments in surface contamination and cleaning. Volume 7, Cleanliness validation and verification /

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Kohli, Rajiv, 1947- (Editor), Mittal, K. L., 1945- (Editor)
Format:	eBook
Language:	English
Published:	Amsterdam : Elsevier, 2015.
Edition:	First edition.
Subjects:	Surfaces (Technology) Surface contamination > Prevention. Cleaning. Surfaces (Technologie) Nettoyage. cleaning. TECHNOLOGY & ENGINEERING > Engineering (General) TECHNOLOGY & ENGINEERING > Reference. Cleaning Electronic books.
Online Access:	Connect to the full text of this electronic book