Applied solid state science. advances in materials and device research / Supplement 2, Silicon integrated circuits. Part C :

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid iso...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Wolfe, Raymond (Editor), Kahng, Dawon (Editor)
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Orlando ; London : Academic, 1985.
Series:	Applied solid state science. Supplement ; 2.
Subjects:	Integrated circuits > Materials. Solid state physics. Circuits intégrés > Matériaux. Physique de l'état solide. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Materials Solid state physics Electronic books.
Online Access:	Connect to the full text of this electronic book