Silicon-on-insulator (SOI) technology : manufacture and applications /
Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process h...
| Corporate Author: | ScienceDirect (Online service) |
|---|---|
| Other Authors: | Kononchuk, Oleg, Nguyen, Bich-Yen |
| Format: | eBook |
| Language: | English |
| Published: |
Cambridge, UK ; Waltham, MA :
Woodhead Pub.,
2014.
|
| Series: | Woodhead Publishing series in electronic and optical materials.
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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