Silicon-on-insulator (SOI) technology : manufacture and applications /

Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process h...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Kononchuk, Oleg, Nguyen, Bich-Yen
Format: eBook
Language:English
Published: Cambridge, UK ; Waltham, MA : Woodhead Pub., 2014.
Series:Woodhead Publishing series in electronic and optical materials.
Subjects:
Online Access:Connect to the full text of this electronic book

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