Silicon-on-insulator (SOI) technology : manufacture and applications /

Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process h...

Full description

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Kononchuk, Oleg, Nguyen, Bich-Yen
Format:	eBook
Language:	English
Published:	Cambridge, UK ; Waltham, MA : Woodhead Pub., 2014.
Series:	Woodhead Publishing series in electronic and optical materials.
Subjects:	Silicon-on-insulator technology. Silicium sur isolant. TECHNOLOGY & ENGINEERING > Mechanical. Silicon-on-insulator technology Electronic books. proceedings (reports) Conference papers and proceedings Conference papers and proceedings. Actes de congrès.
Online Access:	Connect to the full text of this electronic book