Fundamental principles of engineering nanometrology /

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rig...

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Bibliographic Details
Main Author: Leach, R. K. (Author)
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Oxford, OX : Elsevier, William Andrew, 2014.
Edition:Second edition.
Series:Micro & nano technologies.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Summary:Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardiza.
Physical Description:1 online resource (384 pages)
Bibliography:Includes bibliographical references and index.
ISBN:9781455777501
1455777501