Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Nihtianov, S. (Editor), Luque, A. (Antonio) (Editor)
Format:	eBook
Language:	English
Published:	Oxford, UK : Woodhead Publishing, 2013.
Series:	Woodhead Publishing series in electronic and optical materials ; 51.
Subjects:	Detectors > Industrial applications. Microelectromechanical systems > Industrial applications. Microsystèmes électromécaniques > Applications industrielles. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Detectors > Industrial applications Electronic books. Ebook.
Online Access:	Connect to the full text of this electronic book