Sputtering materials for VLSI and thin film devices /

An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: hist...

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Bibliographic Details

Main Author:	Sarkar, Jaydeep (Author)
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Norwich, N.Y. : William Andrew, 2011.
Subjects:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) Écrans plats > Matériaux. Pulvérisation cathodique. Microélectronique > Matériaux. TECHNOLOGY & ENGINEERING > Mechanical. Microelectronics > Materials Electronic books.
Online Access:	Connect to the full text of this electronic book