Organometallic vapor phase epitaxy : theory and practice /
Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...
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| Format: | eBook |
| Language: | English |
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Boston :
Academic Press,
©1989.
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| Online Access: | Connect to the full text of this electronic book |
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