Organometallic vapor phase epitaxy : theory and practice /

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition...

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Bibliographic Details

Main Author:	Stringfellow, G. B. (Gerald B.), 1942-
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Boston : Academic Press, ©1989.
Subjects:	Compound semiconductors. Metal organic chemical vapor deposition. Epitaxy. Épitaxie. Composés semi-conducteurs. Dépôt en phase vapeur par organométalliques. Epitaxy Compound semiconductors Metal organic chemical vapor deposition Metallorganische Verbindungen Gasphasenepitaxie Electronic books.
Online Access:	Connect to the full text of this electronic book