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Ion implantation technology-92 : proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992 /

Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wi...

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Bibliographic Details
Corporate Authors: International Conference on Ion Implantation Technology Gainesville, Fla., ScienceDirect (Online service)
Other Authors: Downey, D. F.
Format: Conference Proceeding eBook
Language:English
Language Notes:English.
Published: Amsterdam ; New York : North-Holland, 1993.
Subjects:
Semiconductors > Congresses.
Ion implantation > Congresses.
Semiconductor doping > Congresses.
Semi-conducteurs > Congrès.
Ions > Implantation > Congrès.
Semi-conducteurs > Dopage > Congrès.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
Ion implantation
Semiconductor doping
Semiconductors
Electronic books.
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congrès.
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Call Number: TK7871.85 .I57623 1993eb
 
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TK7871.85 .I57623 1993eb Available