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Quantitative Data Processing in Scanning Probe Microscopy : SPM Applications for Nanometrology.

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Accurate measurement at the nano-scale - nanometrology - is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture...

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Bibliographic Details
Main Author: Klapetek, Petr
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Burlington : Elsevier Science, 2012.
Series:Micro & nano technologies.
Subjects:
Scanning probe microscopy > Data processing.
Qualitative research > Data processing.
Scanning probe microscopy.
Microscopie à sonde à balayage > Informatique.
Recherche qualitative > Informatique.
Microscopie à sonde à balayage.
SCIENCE > Nanoscience.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Scanning probe microscopy
Scanning probe microscopy > Data processing
Electronic books.
Online Access:Connect to the full text of this electronic book
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