Quantitative Data Processing in Scanning Probe Microscopy : SPM Applications for Nanometrology.

Accurate measurement at the nano-scale - nanometrology - is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture...

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Bibliographic Details

Main Author:	Klapetek, Petr
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	Burlington : Elsevier Science, 2012.
Series:	Micro & nano technologies.
Subjects:	Scanning probe microscopy > Data processing. Qualitative research > Data processing. Scanning probe microscopy. Microscopie à sonde à balayage > Informatique. Recherche qualitative > Informatique. Microscopie à sonde à balayage. SCIENCE > Nanoscience. TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS. Scanning probe microscopy Scanning probe microscopy > Data processing Electronic books.
Online Access:	Connect to the full text of this electronic book