Impurity doping processes in silicon /
This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many te...
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
[Place of publication not identified] :
North Holland,
1981.
|
| Series: | Materials processing, theory and practices ;
v. 2. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many texts, this work describes the double-diffusion method. |
|---|---|
| Item Description: | Title from publisher supplied information (viewed November 30, 2012). |
| Physical Description: | 1 online resource |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0444860959 9780444860958 |