Impurity doping processes in silicon /

This book introduces to non-experts several important processes of impurity doping in silicon and goes on to discuss the methods of determination of the concentration of dopants in silicon. The conventional method used is the discussion process, but, since it has been sufficiently covered in many te...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Wang, Franklin F. Y., 1928- (Editor)
Format: eBook
Language:English
Published: [Place of publication not identified] : North Holland, 1981.
Series:Materials processing, theory and practices ; v. 2.
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Call Number: TK7871.85 .I48 1981
 
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TK7871.85 .I48 1981 Available