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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS /

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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Adachi, Hideaki, Wasa, Kiyotaka, Kanno, Isaku, Kotera, Hidetoshi
Format: eBook
Language:English
Published: Waltham, MA : William Andrew, ©2012.
Edition:2nd ed.
Subjects:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Pulvérisation cathodique > Applications industrielles > Guides, manuels, etc.
Couches minces > Guides, manuels, etc.
Cathode sputtering (Plating process)
Thin films
Electronic books.
manuals (instructional materials)
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
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Holdings details from Available Online
Call Number: TS695 .H36 2012
 
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TS695 .H36 2012 Available