VLSI metallization /

Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Einspruch, Norman G., Cohen, Simon S., Gildenblat, Gennady Sh
Format:	eBook
Language:	English
Published:	Orlando : Academic Press, 1987.
Series:	VLSI electronics ; v. 15.
Subjects:	Integrated circuits > Very large scale integration > Design and construction. Metallic films. Metallizing. Couches minces métalliques. Métallisation. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration > Design and construction Metallic films Metallizing Integrated circuits Electronic books.
Online Access:	Connect to the full text of this electronic book

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