Beam processing technologies /

Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Einspruch, Norman G., Cohen, Simon S. (Simon S.), Singh, Raj N.
Format:	eBook
Language:	English
Published:	San Diego, Calif. : Academic Press, ©1989.
Series:	VLSI electronics ; v. 21.
Subjects:	Integrated circuits > Very large scale integration. Electron beams. Ion bombardment. Molecular beam epitaxy. Circuits intégrés à très grande échelle. Faisceaux électroniques. Bombardement ionique. Épitaxie par jets moléculaires. TECHNOLOGY & ENGINEERING > Mechanical. Electron beams Integrated circuits > Very large scale integration Ion bombardment Molecular beam epitaxy Electronic books.
Online Access:	Connect to the full text of this electronic book

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