Semiconductors and semimetals. optical and photothermal characterization / Volume 46, Effect of disorder and defects in ion-implanted semiconductors :

Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need t...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Ghibaudo, Gérard, Christofides, Constantinos
Format:	eBook
Language:	English
Language Notes:	English.
Published:	San Diego : Academic Press, ©1997.
Series:	Semiconductors and semimetals ; 46.
Subjects:	Semiconductors > Defects. Ion implantation. Semi-conducteurs > Défauts. Ions > Implantation. Ion implantation Semiconductors > Defects Electronic books.
Online Access:	Connect to the full text of this electronic book