Thin films by chemical vapour deposition /

The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several uniqu...

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Bibliographic Details

Main Author:	Moroșanu, C. E.
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Amsterdam ; New York : Bucharest, Romania : Elsevier ; Editura Tehnică, 1990.
Series:	Thin films science and technology ; 7.
Subjects:	Vapor-plating. Thin films. Semiconductors. Semiconductors Couches minces. Semi-conducteurs. semiconductor. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Thin films Vapor-plating Aufdampfen Dünne Schicht Electronic books.
Online Access:	Connect to the full text of this electronic book