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Oxygen in silicon /

This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions,...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Shimura, Fumio
Format: eBook
Language:English
Published: Boston : Academic Press, Inc., ©1994.
Series:Semiconductors and semimetals ; v. 42.
Subjects:
Semiconductors.
Oxygen.
Silicon.
Semi-conducteurs.
Oxygène.
Silicium.
semiconductor.
oxygen.
silicon.
SCIENCE > Physics > Electricity.
Oxygen
Semiconductors
Silicon
Silicone.
Semiconducteurs.
Semimetals.
Electronic books.
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Call Number: TK7872.S4 W5 v.42
 
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