Rapid thermal processing : science and technology /

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Fair, Richard B.
Format:	eBook
Language:	English
Published:	Boston : Academic Press, ©1993.
Subjects:	Semiconductors > Heat treatment. Semiconductor doping. Rapid thermal processing. Semi-conducteurs > Traitement thermique. Semi-conducteurs > Dopage. Recuit thermique rapide. Rapid thermal processing Semiconductor doping Semiconductors > Heat treatment Tecnologia de dispositivos semicondutores. Semiconductors Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

1. Rapid Thermal Processing
A Justification / Richard B. Fair
2. Rapid Thermal Processing-Based Epitaxy / J.L. Hoyt
3. Rapid Thermal Growth and Processing of Dielectrics / Hisham Z. Massoud
4. Thin-Film Deposition / Mehmet C. Ozturk
5. Extended Defects from Ion Implantation and Annealing / Kevin S. Jones and George A. Rozgonyi
6. Junction Formation in Silicon by Rapid Thermal Annealing / Richard B. Fair
7. Silicides / C.M. Osburn
8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing / B. Lojek
9. Manufacturing Equipment Issues in Rapid Thermal Processing / Fred Roozeboom.