Rapid thermal processing : science and technology /

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Fair, Richard B.
Format:	eBook
Language:	English
Published:	Boston : Academic Press, ©1993.
Subjects:	Semiconductors > Heat treatment. Semiconductor doping. Rapid thermal processing. Semi-conducteurs > Traitement thermique. Semi-conducteurs > Dopage. Recuit thermique rapide. Rapid thermal processing Semiconductor doping Semiconductors > Heat treatment Tecnologia de dispositivos semicondutores. Semiconductors Electronic books.
Online Access:	Connect to the full text of this electronic book