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Ion implantation in semiconductors, silicon and germanium

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Bibliographic Details
Main Authors: Mayer, James W., 1930-, Eriksson, Lennart, 1938- (Author), Davies, John Arthur, 1927- (Author)
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: New York, Academic Press, 1970.
Subjects:
Ion implantation.
Semiconductors.
Ion bombardment.
Semiconductors
Semi-conducteurs.
Bombardement ionique.
Ions > Implantation.
semiconductor.
33.72 electronic transport in condensed matter.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
Ion bombardment
Ion implantation
Halbleiter
Ionenimplantation
Halfgeleiders.
Ionenimplantatie.
Silicium.
Germanium.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xiii, 280 pages) illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references.
ISBN:9780124808508
0124808506
9780323157216
0323157211