Ion implantation in semiconductors, silicon and germanium

Bibliographic Details
Main Authors:	Mayer, James W., 1930-, Eriksson, Lennart, 1938- (Author), Davies, John Arthur, 1927- (Author)
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	New York, Academic Press, 1970.
Subjects:	Ion implantation. Semiconductors. Ion bombardment. Semiconductors Semi-conducteurs. Bombardement ionique. Ions > Implantation. semiconductor. 33.72 electronic transport in condensed matter. TECHNOLOGY & ENGINEERING > Electronics > Semiconductors. TECHNOLOGY & ENGINEERING > Electronics > Solid State. Ion bombardment Ion implantation Halbleiter Ionenimplantation Halfgeleiders. Ionenimplantatie. Silicium. Germanium. Electronic books.
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