Ion implantation /

Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Hirvonen, J. K. (James Karsten), 1943-
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1980.
Series:	Treatise on materials science and technology ; v. 18.
Subjects:	Ion implantation. Materials > Effect of radiation on. Matériaux > Effets du rayonnement sur. Ions > Implantation. Ion implantation Materials > Effect of radiation on Analyse Aufsatzsammlung Dünne Schicht Ionenimplantation Werkstoffkunde Matériaux. Métallurgie. Electronic books. Aufsatzsammlung.
Online Access:	Connect to the full text of this electronic book

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