Thin film processes /

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...

Full description

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Vossen, John L., Kern, Werner, 1925-
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1978.
Subjects:	Thin films. Couches minces. Thin films Thin film devices. Surfaces (Technology) Couches minces > Technologie. Electronic books.
Online Access:	Connect to the full text of this electronic book