Electron-beam technology in microelectronic fabrication /

Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Brewer, George Raymond, 1922-, Ballantyne, J. P.
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1980.
Subjects:	Microelectronics. Lithography, Electron beam. Miniaturization Microélectronique. Lithographie par faisceau d'électrons. microelectronics. TECHNOLOGY & ENGINEERING > Electronics > Digital. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. Lithography, Electron beam Microelectronics Elektronenstrahllithografie Mikroelektronik Electronic books.
Online Access:	Connect to the full text of this electronic book

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