Handbook of VLSI microlithography : principles, technology, and applications /

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Glendinning, William B., Helbert, John N.
Format:	eBook
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, ©1991.
Series:	Materials science and process technology series.
Subjects:	Integrated circuits > Very large scale integration. Microlithography. Circuits intégrés à très grande échelle. Microlithographie. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration Microlithography VLSI Lithographie (Halbleitertechnologie) Photolithographie (Halbleitertechnologie) Electronic books.
Online Access:	Connect to the full text of this electronic book