Handbook of silicon based MEMS : materials & technologies /

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Lindroos, Veikko
Format:	eBook
Language:	English
Published:	Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Micro-Electrical-Mechanical Systems Microsystèmes électromécaniques. Microsystèmes électromécaniques > Matériaux. Microelectromechanical systems Microelectromechanical systems > Materials Silicon > Electric properties Electronic books.
Online Access:	Connect to the full text of this electronic book