ScienceDirect (Online service) & Bucknall, D. G. (2005). Nanolithography and patterning techniques in microelectronics. Woodhead Pub. ; CRC Press.
Chicago Style (17th ed.) CitationScienceDirect (Online service) and David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press, 2005.
MLA (9th ed.) CitationScienceDirect (Online service) and David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics. Woodhead Pub. ; CRC Press, 2005.
Warning: These citations may not always be 100% accurate.