Nanolithography and patterning techniques in microelectronics /
Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
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Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
©2005.
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| Series: | Woodhead Publishing in materials.
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| Online Access: | Connect to the full text of this electronic book |
Internet
Connect to the full text of this electronic bookAvailable Online
| Call Number: |
TK7874 .N318 2005eb |
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| Call Number | Status | Get It |
| TK7874 .N318 2005eb | Available | |