Nanolithography and patterning techniques in microelectronics /

Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Bucknall, David G.
Format: eBook
Language:English
Language Notes:English.
Published: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, ©2005.
Series:Woodhead Publishing in materials.
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Call Number: TK7874 .N318 2005eb
 
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TK7874 .N318 2005eb Available