Chemical mechanical polishing in silicon processing /

Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landm...

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Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Li, Shin Hwa, Miller, Robert O., 1947-
Format:	eBook
Language:	English
Published:	San Diego, CA : Academic Press, ©2000.
Series:	Semiconductors and semimetals ; v. 63.
Subjects:	Grinding and polishing. Silicon. Silicon Silicium. silicon. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Grinding and polishing Fisica geral. GRINDING (MATERIAL REMOVAL) POLISHING. SILICON. Semiconducteurs. Electronic books.
Online Access:	Connect to the full text of this electronic book