Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes /

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...

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Bibliographic Details

Main Author:	Bao, Min-Hang
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Language Notes:	English.
Published:	Amsterdam ; New York : Elsevier, 2000.
Series:	Handbook of sensors and actuators ; v. 8.
Subjects:	Transducers > Handbooks, manuals, etc. Microelectromechanical systems > Handbooks, manuals, etc. Transducteurs > Guides, manuels, etc. Microsystèmes électromécaniques > Guides, manuels, etc. TECHNOLOGY & ENGINEERING > Sensors. Microelectromechanical systems Transducers Electronic books. manuals (instructional materials) handbooks. Handbooks and manuals Handbooks and manuals. Guides et manuels.
Online Access:	Connect to the full text of this electronic book