Micro mechanical systems : principles and technology /
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Amsterdam ; New York :
Elsevier,
1998.
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| Series: | Handbook of sensors and actuators ;
v. 6. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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